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document number: mpxh6250a rev 3.2, 07/2012 pressure freescale semiconductor data sheet: technical data ? 2007-2009, 2012 freescale semiconductor, inc. all rights reserved. high temperature accuracy integrated silicon pressure sensor for measuring absolute pressure, on-chip signal conditioned, temperature compensated and calibrated the freescale mpxh6250a series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor ne tworks to provide a high output signal and temperature compensation. the small form factor and high reliability of on-chip integration make the freescale map sensor a logical and economical choice for automotiv e system designers. the mpxh6250a series piezoresistive transducer is a state-of-the-art, monolithic, signal conditione d, silicon pressure sensor. this sensor combines advanced micromachining techniques, th in film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure. features ? improved accuracy at high temperature ? available in super small outline package ? 1.5% maximum error over 0 ? to 85 ?c ? ideally suited for mi croprocessor or microcontroller-based systems ? temperature compensated from -40 ? to +125 ?c ? durable thermoplastic ( pps) surface mount package ordering information device name case no. # of ports pressure type device marking none single dual gauge differential absolute super small outline package (mpxh6250a series) mpxh6250a6u 1317 ? ? mpxh6250a mpxh6250a6t1 1317 ? ? mpxh6250a mpxh6250ac6u 1317a ? ? mpxh6250a mpxh6250ac6t1 1317a ? ? mpxh6250a super small outline package (media resistant gel) (mpxhz6250a series) mpxhz6250a6t1 1317 ? ? mpxhz6250a mpxhz6250a6u 1317 ? ? mpxhz6250a mpxhz6250ac6t1 1317a ? ? mpxhz6250a mpxh6250a series 20 to 250 kpa (3 to 36 psi) 0.3 to 4.9 v output mpxhz6250a mpxh6250a6u/6t1 mpxhz6250a6u/6t1 case 1317 super small outline package mpxh6250ac6u/c6t1 mpxhz6250ac6t1 case 1317a application examples ? industrial controls ? engine control/manifold absolute pressure (map)/liquefied petroleum gas (lpg)
pressure mpxh6250a sensors 2 freescale semiconductor, inc. operating characteristics table 1. operating characteristics (v s = 5.1 vdc, t a = 25c unless otherwise noted, p1 > p2.) characteristic symbol min typ max unit pressure range p op 20 ? 250 kpa supply voltage (1) 1. device is ratiometric within this specified excitation range. v s 4.74 5.1 5.46 vdc supply current i o ? 6.0 10 madc minimum pressure offset (0 to 85 ? c) @ v s = 5.1 volts (2) 2. offset (v off ) is defined as the output voltage at the minimum rated pressure. v off 0.133 0.204 0.274 vdc full scale output (0 to 85 ? c) @ v s = 5.1 volts (3) 3. full scale output (v fso ) is defined as the output voltage at the maximum or full rated pressure. v fso 4.826 4.896 4.966 vdc full scale span (0 to 85 ? c) @ v s = 5.1 volts (4) 4. full scale span (v fss ) is defined as the algebraic difference between the output volt age at full rated pressure and the output voltage at the minimum rated pressure. v fss 4.552 4.692 4.833 vdc accuracy (5) (0 to 85 ? c) 5. accuracy is the deviation in actual out put from nominal output over the entire pressure range and temperature range as a perc ent of span at 25? c due to all sources of error including the following: linearity: output deviation from a straight line relationship with pressure over the specified pressure range. temperature hysteresis: output deviation at any temperature within the operating tem perature range, after the temperature is cy cled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. pressure hysteresis: output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 ? c. tcspan: output deviation over the temperature range of 0 to 85 ? c, relative to 25 ? c. tcoffset: output deviation with minimum rated pressu re applied, over the temperature range of 0 to 85 ? c, relative to 25 ? c. variation from nominal: the variation from nominal val ues, for offset or full scal e span, as a percent of v fss , at 25 ? c. ??? ? 1.5 %v fss sensitivity v/p ? 20.4 ? mv/kpa response time (6) 6. response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when s ubjected to a specified step change in pressure. t r ?1.0?ms warm-up time (7) 7. warm-up time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. ??20?ms offset stability (8) 8. offset stability is the product's output deviation when subjected to 1000 hours of pu lsed pressure, temperature cycling with bias test. ?? ? 0.25 ? %v fss
pressure mpxh6250a sensors freescale semiconductor, inc. 3 maximum ratings figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip. figure 1. integrated pressure sensor schematic table 2. maximum ratings (1) 1. exposure beyond the specified limits may cause permanent damage or degradation to the device. rating symbol value unit maximum pressure (p1 > p2) p max 1000 kpa storage temperature t stg -40 to +125 ? c operating temperature t a -40 to +125 ? c output source current @ full scale output (2) 2. maximum output current is contro lled by effective impedance from v out to gnd or v out to v s in the application circuit. i o +0 . 5m a d c output sink current @ minimum pressure offset 2 i o ?- 0 . 5m a d c v s v out gnd sensing element pins 1, 5, 6, 7, and 8 are no connects for super small outline package devices. thin film temperature compensation and gain stage #1 gain stage #2 and ground reference shift circuitry 3 4 2
pressure mpxh6250a sensors 4 freescale semiconductor, inc. on-chip temperature compensation and calibration figure 2 illustrates the absolute sensing chip in the basic super small outline chip carrier (case 1317). figure 3 illustrates a typical application circuit (output source current operation). figure 4 shows the sensor output signal relative to pressure input. typical minimum and maximum output curves are shown for operation over 0 to 85 ? c temperature range. the output will saturate outside of the rated pressure range. a fluorosilicone gel isolates the die surface and wire bonds from the environment, while a llowing the pressure signal to be transmitted to the silicon diaphragm. the mpxh6250a series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. media other than dry air may have adverse effects on sensor performance and long-term reliability. contact the factory for information regarding media compatibility in your application. figure 2. cross sectional diagram ssop (not to scale) figure 3. typical application circuit (output source current operation) figure 4. output vs. absolute pressure fluorosilicone gel die coat wire bond lead frame sealed vacuum reference absolute element die bond stainless steel cap thermoplastic case p1 die v s pin 2 + 5.1 v gnd pin 3 v out pin 4 mpxh6250a to adc 100 nf 51 k 47 pf output (volts) pressure (reference to sealed vacuum) in kpa 20.0 31.5 43.0 54.5 66.0 77.5 89.0 100.5 112.0 123.5 135.0 146.5 158.0 169.5 181.0 192.5 204.0 215.5 227.0 238.5 4.5 0 4.0 5.0 1.0 1.5 2.0 2.5 3.0 3.5 0.5 250.0 transfer function: v out = v s *(0.0040*p-0.040) error v s = 5.1 vdc temperature = 0 to 85c min max typ
pressure mpxh6250a sensors freescale semiconductor, inc. 5 surface mounting information minimum recommended footprint for super small outline packages surface mount board layout is a critical portion of the total design. the footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. with the correct pad geometry, the packages will self-align when subjected to a solder reflow process. it is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts. figure 5. ssop footprint (case 1317 and 1317a) nominal transfer value: v out = v s x (0.004 x p - 0.040) (pressure error x temp factor x 0.004 x v s ) v s = 5.1 ? 0.36 vdc transfer function temp multiplier -40 3 0 to 85 1 125 1.75 temperature in c 4.0 3.0 2.0 0.0 1.0 -40 -20 0 20 40 60 140120100 80 temperature error factor note: the temperature multiplier is a linear response from 0c to -40c and from 85c to 125c. temperature error band pressure error (max) pressure error band 20 to 250 (kpa) 3.45 (kpa) pressure (in kpa) error limits for pressure break points 3.0 2.0 1.0 -1.0 -2.0 -4.0 0.0 4.0 -3.0 20 pressure error (kpa) 60 100 140 180 220 260 300 0.027 typ 8x 0.69 0.053 typ 8x 1.35 inch mm 0.387 9.83 0.150 3.81 0.050 1.27 typ
pressure mpxh6250a sensors 6 freescale semiconductor, inc. package dimensions case 1317-04 issue h super small outline package page 1 of 3
pressure mpxh6250a sensors freescale semiconductor, inc. 7 package dimensions case 1317-04 issue h super small outline package page 2 of 3
pressure mpxh6250a sensors 8 freescale semiconductor, inc. package dimensions case 1317-04 issue h super small outline package page 3 of 3
pressure mpxh6250a sensors freescale semiconductor, inc. 9 package dimensions case 1317a-04 issue d super small outline package page 1 of 2
pressure mpxh6250a sensors 10 freescale semiconductor, inc. package dimensions case 1317a-04 issue d super small outline package page 2 of 2
pressure mpxh6250a sensors freescale semiconductor, inc. 11 table 3. revision history revision number revision date description of changes 3.1 05/2012 ? updated package drawing 98arh99066a was rev. f, updated to rev. h. 3.2 07/2012 ? changed figure 1 vout form pin 1 to pin 4.
mpxh6250a rev. 3.2 07/2012 information in this document is provided solely to enable system and software implementers to use freescale products. there are no express or implied copyright licenses granted hereunder to design or f abricate any integrated circuits based on the information in this document. freescale reserves the right to make changes without further notice to any products herein. freescale makes no warranty, representation, or guarantee regarding the suitability of its products for any particular purpose, nor does freescale assume any liability arising out of the app lication or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. ?typical? parameters that may be provided in freescale data sheets and/or specifications can and do vary in different applications, and actual performance may vary over time. all operating parameters, including ?typicals,? must be validated for each customer application by customer?s technica l experts. freescale does not convey any license under its patent rights nor the rights of others. freescale sells products pursuant to standard terms and conditions of sale, which can be found at the following address: store.esellerate.net/store/policy.asselectorpx?selector=rt&s=str0326182960&pc. freescale and the freescale logo are tradem arks of freescale semiconductor, inc., reg. u.s. pat. & tm. off. all other product or service names are t he property of their respective owners. ? 2012 freescale semiconductor, inc. all rights reserved. how to reach us: home page: www.freescale.com web support: http://www.freescale.com/support

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